Composite aluminum plate and target for physical coating processes produced therefrom and methods for producing same
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United States of America Patent
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Jul 16, 1991
Grant Date -
N/A
app pub date -
Nov 27, 1989
filing date -
Nov 25, 1988
priority date (Note) -
Expired
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Abstract
The present invention provides a composite aluminum plate suitable as a target for coating purposes, said plate comprising a surface layer melted on the basis of pure aluminum (Al.gtoreq.99.99), optionally consisting of a pure alloy, e.g., the members of which have a purity greater than or equal to 99.99%, melted on the basis of pure aluminum (Al.gtoreq.99.99); and (2) a supporting layer comprising a hardenable aluminum alloy having a Brinell hardness index HB of at least about 50 after being heat-treated under suitable conditions. This invention further provides a target suitable for physical or sputter coating processes, such as cathodic sputtering and magnetron sputtering. Methods for preparing such a plate and target are also provided.
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