Catadioptric imaging system
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United States of America Patent
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Jul 16, 1991
Grant Date -
N/A
app pub date -
Sep 24, 1990
filing date -
Sep 24, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An improved catadioptric imaging system is presented which produces a flat accessible final image, and is particularly effective at high speed in the deep ultraviolet spectral range. The lenses of the system are formed from a single glass type, fused silica. A first group of lenses serves as an aberration corrector group. A single focusing lens focuses light, transmitted through the corrector group, forming an intermediate image at a predetermined position within the system. A separate field lens is placed at the intermediate image point, and focuses the light transmitted thereto through a hole in the center of a spherical mirror. The light then travels through a separate thick lens element and is subsequently reflected by a planar mirror back through the thick lens and towards the concave reflective side of the spherical mirror. The spherical mirror thereafter reflects this incident light, focusing it through a hole in the center of the planar mirror and to a final imaging point outside of the system.
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