Slicing machine and control method thereof
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United States of America Patent
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Jun 25, 1991
Grant Date -
N/A
app pub date -
Jan 13, 1989
filing date -
Jan 18, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A slicing machine of this invention includes a blade having a cutting edge for slicing a silicon ingot, a tension disk for rotatably supporting the blade, a drive motor for rotating the blade, a deformation detection mechanism for detecting a deformation amount of the blade, and a control unit responsive to the measured deformation for correcting the relative position between the support base and the blade. A control method of the slicing machine is also disclosed.
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