Positioning device of table for semiconductor wafers
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United States of America Patent
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-
Jun 11, 1991
Grant Date -
N/A
app pub date -
Oct 26, 1989
filing date -
Dec 9, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A positioning device for a table on which a semiconductor wafer is moved into an inspection position is described. It comprises a pneumatic stage supporting the table and movable both in the x and y directions, a moving device using wire which moves the stage in the x or y direction, and a fine resolution lifting device which moves or lifts the table vertically.
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