Film circuit substrate exposure apparatus
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United States of America Patent
Stats
-
Jun 4, 1991
Grant Date -
N/A
app pub date -
Jan 24, 1990
filing date -
Nov 24, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A film circuit substrate exposure apparatus is disclosed, in which members movable along an optical axis such as a reticle support, a projection lens and a film pressing member are mounted on a common linear movement guide by using a linear movement driver, for instance a cross roller guide, in a predetermined spaced-apart relation to one another to set the optical axis and without inclination with respect to the optical axis. The apparatus thus pronounced practical merits such as freedom from rattling, capability of ready positioning and focusing operations, less partial out of focus or aberration of obtainable patterns, and particularly elimination of complicated operations in double side exposure.
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