Isolation valve used in a single crystal pulling apparatus

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United States of America Patent

PATENT NO 5020775
SERIAL NO

07495964

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An isolation valve used in a single crystal pulling apparatus, having a frame (11), a vertical passageway for communication between a main chamber and an upper pull chamber of the single crystal pulling apparatus, a shaft (13) capable of turning about its axis and reciprocating vertically, a lever (20) for turning the shaft, a drive means (18) for reciprocating the shaft (13), an arm (14) fixed to the shaft (13), a circular shutter (15) held by the arm (14) for closing and opening the vertical passageway, and a flange (9) defining a hole which communicates the passageway with the main chamber, wherein a cylindrical cavity is made in the bottom of the circular shutter (15); the flange (9) has a circular raised rim (9b) extending upward whose outer diameter is slightly smaller than the diameter of the cylindrical cavity of the shutter; and an endless circular seal means (17) is embedded partially in either the external vertical wall of the raised rim (9b) of the flange or the internal vertical wall of the shutter (15).

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU HANDOTAI CO LTD2-1 OHTEMACHI 2-CHOME CHIYODA-KU TOKYO 1000004

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwasaki, Atsushi Takefu, JP 124 1368
Mizuishi, Koji Annaka, JP 13 103
Oda, Michiaki Annaka, JP 16 148

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