Substrates with dense metal vias produced as co-sintered and porous back-filled vias

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United States of America Patent

PATENT NO 5011725
SERIAL NO

07319625

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Dense metal vias in pure alumina substrates are derived from a metallization composition having 80-97% refractory metal, 2-15% alumina, 0.05-5% sintering aid, and 0-5% bonding additive; it has been found that for alumina contents greater than about 12%, a bonding additive is not required. The same compositions, absent the sintering aid, can be used to form bimetallic vias; these vias include a porous metal network where the pores are infiltrated with another metal, for example, porous tungsten infiltrated with copper.

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Patent Owner(s)

Patent OwnerAddress
CERAMICS PROCESS SYSTEMS CORPORATION840 MEMORIAL DR CAMBRIDGE MA 02139

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Foster, Brian C Sutton, MA 6 164

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