Reaction chamber having non-clouded window
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United States of America Patent
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Apr 9, 1991
Grant Date -
N/A
app pub date -
Mar 14, 1990
filing date -
Mar 14, 1990
priority date (Note) -
Expired
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Abstract
A reaction chamber for performing a chemical vapor deposition process wherein the window through which the light must pass is prevented from becoming clouded. The chamber is divided by baffles into a reactant zone, a buffer zone, and a window zone, and the momentum flux densities of the gases flowing in the respective zones are about matched. Additionally, discontinuities are provided on the walls of the reactor to impede diffusion of the reactant gas towards the window.
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