Substrate bias voltage generating and regulating apparatus
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United States of America Patent
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Mar 26, 1991
Grant Date -
N/A
app pub date -
Jan 19, 1989
filing date -
Jan 19, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for generating and regulating a substrate bias voltage for use in semiconductor devices. The invention comprises a sensor which is responsive to the substrate bias voltage, and generates a continuously variable regulating voltage and a continuously variable oscillator bias voltage. A variable impedance device whose resistance is adjustable over a range of values as a function of said regulating voltage is coupled to a charge pump to control the amount of charge pumped by said charge pump per unit time from the substrate of the semiconductor device. An oscillator whose frequency is continuously controlled by the oscillator bias voltage from the sensor is coupled to said charge pump so as to further control the amount of charge pumped by said charge pump per unit time.
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