Semiconductor waxer detection system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 26, 1991
Grant Date -
N/A
app pub date -
Oct 18, 1989
filing date -
Nov 18, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer basket station includes a semiconductor wafer basket containing therein a number of semiconductor wafers and an elevating device which raises and lowers the wafer basket to bring a desired wafer in its taken out height. A wafer detecting device is formed with a transmission type optical sensor disposed inclined so that the optical axis thereof passes a center of a semiconductor wafer at the desired height, but not to pass adjacent wafers of the semiconductor wafer. The elevating device of the wafer basket has an elevator which supports wafers to be worked and treated and is guided and driven vertically with respect to a base frame of the device. The elevator is provided with an opaque body. A photocoupler support plate is guided to move vertically and supported with respect to the base frame of the device. A spring means is energized in the departing direction away from the photocoupler support plate against the base frame. A screw adjusting means is rotatably supported while being restricted to move downwardly with respect to the base frame and connected with the support plate, so that by its rotation the relative position of the photocoupler and the base frame is adjusted.
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