System for scanning large sample areas with a scanning probe microscope

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4999494
SERIAL NO

07405660

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A scanning probe microscope head, which includes means for scanning a probe over a limited portion of a sample surface, includes a casing having feet resting on the sample surface and is moved by positioning means to different portions of the sample surface while the head slides across the sample surface. In one embodiment, a positioning arm is mounted on a carriage driven by a first feed screw, while a sample support is mounted for adjustment by a second feed screw perpendicular to the first. In a second embodiment, the arm is mounted on an X-Y stage adjusted by perpendicular feed screws. In another embodiment, the head rests on the support surface for the sample and slides along this surface as its position is adjusted. The positioning arm supports one or two magnets which magnetically couple the arm to the head casing. The casing is made of ferromagnetic material or nonmagnetic material with a ferromagnetic insert.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elings, Virgil B Santa Barbara, CA 54 2876

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