Filamentless magnetron-ion source and a process using it
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United States of America Patent
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Feb 12, 1991
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N/A
app pub date -
Jun 26, 1989
filing date -
Nov 11, 1987
priority date (Note) -
Expired
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Abstract
The invention relates to a filamentless magnetron-ion source with a magnetron, a microwave guide or a microwave coaxial line, a cylindrical cavity resonator, a lambda-4-short circuit slider member, ECR magnets and a quartz dome. The invention also relates to a process using the said apparatus.
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