High purity gas delivery control assembly
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United States of America Patent
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-
Feb 12, 1991
Grant Date -
N/A
app pub date -
Dec 15, 1989
filing date -
Jan 4, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a high purity gas delivery control assembly (100) having straight through gas flow. The bellows (118) which operates a gas flow interruption means (114) is isolated during gas flow and dead volumes are reduced to a minimum. This prevents the introduction of unwanted particles into the gas stream.
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