High position resolution sensor with rectifying contacts
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United States of America Patent
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Jan 22, 1991
Grant Date -
N/A
app pub date -
Oct 11, 1989
filing date -
Oct 11, 1989
priority date (Note) -
Expired
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Abstract
The invention provides a position sensor for detecting relative displacement between two elements, and includes an optical beam-producing source fixed to one of the elements, a semiconductor body fixed to a second element and arranged so that the beams impinge one surface of the semiconductor body, a planar sensor composed of a back-to-back diode photodetector positioned on the semiconductor surface, and readout means to monitor current generated by the sensor which gives a measure of the relative position between the element to which the semiconductor body is affixed.
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