Process for forming a crystalline diamond film
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United States of America Patent
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Jan 22, 1991
Grant Date -
N/A
app pub date -
May 4, 1989
filing date -
May 9, 1988
priority date (Note) -
Expired
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Abstract
A crystalline diamond film is formed on a thin substrate. Energy is applied by a thermal plasma torch to a gas mixture to deposit carbon particles onto the substrate. The substrate is positioned on a pedestal with a cooling facility in which an intermediate layer of thermally conductive powder is interposed between the substrate and the pedestal.
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