Mass flow controller
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United States of America Patent
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-
Dec 18, 1990
Grant Date -
N/A
app pub date -
Jun 15, 1989
filing date -
Jun 20, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A mass flow controller including a valve assembly wherein a flow rate-controlling portion of the valve assembly is mirror finished and wherein the maximum flow rate through the flow rate-controlling portion during the time that the flow rate is not being controlled is set so as to be sufficiently large in comparison with the flow rate during control whereby a moisture purging function may be performed without external fluid bypass circuits.
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