Wafer handling system
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United States of America Patent
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-
Nov 27, 1990
Issued Date -
N/A
app pub date -
Apr 17, 1989
filing date -
Feb 9, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention relates to apparatus for pre-aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .theta. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.
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