Protective coating useful as passivation layer for semiconductor devices

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United States of America Patent

PATENT NO 4972250
SERIAL NO

07020920

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Abstract

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A protective coating useful as a passivation layer for semiconductor devices incorporates a thin film of an amorphous diamond-like carbon. In one implementation, a thin film of amorphous silicon is deposited over the carbon material. The semiconductive passivation coating eliminates electrical shorts, dissipates charge build-up and protects against chemical contamination.

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Patent Owner(s)

Patent OwnerAddress
MICROWAVE TECHNOLOGY INC 4268 SOLAR WAY FREMONT CA 94538 A CORP OF CACA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Omori, Masahiro Palo Alto, CA 18 245
Stoneham, Edward B Los Altos, CA 25 440

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