Process control interface system for managing measurement data

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United States of America Patent

PATENT NO 4967381
SERIAL NO

07375898

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system and method for computer control of machine processes. The system and method provide a set of predefined data management or data analysis tasks which an operator of the system can use when using the system to run a selected process. Measurement data structures for storing data measured during the running of processes, and related data, for a multiplicity of processes are defined and stored. Data is added to these data structures each time a process is run, and this data is automatically accessed when the operator requests data analysis on the data collected during previous uses of a selected process. Access to measurement data for detailed data management tasks is provided graphically through the use of trend charts and statistical quality control charts. These charts depict trends in the measurement data for selected processes. By pointing at any data point in the chart, the user can access the corresponding record of data for detailed data analysis or for use in a data management task.

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Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS (A CA CORP )2400 CHARLESTON ROAD MOUNTAIN VIEW CA 94043

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kumagi, Shoji Santa Clara, CA 2 415
Lane, Leslie A Santa Clara, CA 7 896
Lybeck, Lynn V Moss Beach, CA 6 693
Perloff, David S Sunnyvale, CA 11 1093

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