Method and apparatus for detecting and sizing particles on surfaces

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United States of America Patent

PATENT NO 4967095
SERIAL NO

07411910

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and apparatus for detecting and classifying particles on a surface in which condensation is used to enlarge particles. An apparatus of the present invention includes a heatable wick disposed over a test surface and in fluid communication with a source of volatile liquid. A zone of vapor supersaturation is thus created in which condensation on particles on the surface can occur. A light beam directed onto the surface scans the surface. Droplets are detected by means of light scattered from the droplets. In an alternate embodiment a stream of carrier gas may be provided around the wick or bubbled through a jar of volatile liquid to direct a vapor toward the test surface. In another embodiment, multiple wicks communicate with different sources of volatile liquids. In a method of the invention, mulitple scans are made with either different levels of vapor supersaturation or different vapor compositions. Comparing particles in each scan allows one to classify particles into different size ranges or chemical type.

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Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS 2400 CHARLESTON ROAD MOUNTAIN VIEW 94043 A CORP OF CANot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berger, Josef Los Altos, CA 51 1182
Neukermans, Armand P Palo Alto, CA 73 5897
Vaught, John L Palo Alto, CA 11 1267

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