Multi-disk clamp end effector

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United States of America Patent

PATENT NO 4958873
SERIAL NO

07251786

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Abstract

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A multi-disk clamp end effector carries around a tubular member a plurality of disks with a center hole like wafers and releases them sequentially one at a time. Each disk is attached to the tubular member by means of a holder which not only supports the disk but also is pressed to the tubular member by an elastic ring. As the tubular member is gradually retracted and its front end passes the position of each holder, the contracting force of the spring disengages the holder from the disk to which it is attached and the corresponding disk is released.

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Patent Owner(s)

Patent OwnerAddress
INTELMATEC INC A CORP OF CAFREMONT CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagawa, Minoru Fremont, CA 18 172

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