Prealigner probe
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United States of America Patent
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Sep 18, 1990
Grant Date -
N/A
app pub date -
Mar 7, 1989
filing date -
Mar 7, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An edge detection system for measuring lateral position in the presence of height variations such as found in gauging the edge position of a wafer uses first and second capacitive probes formed of passive elements with the active components kept outside the probe and at a distance that permits a smaller, stabler and more economical probe to be located at the location of the wafer. The probes are instrumented in an electronic circuit having plural operational amplifiers that drive the probes to compensate the edge detection for wafer height effects.
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