Apparatus for transferring disks from one cassette to another with different pitch

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United States of America Patent

PATENT NO 4957406
SERIAL NO

07349399

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus is provided for transferring disks with center holes such as semiconductor wafers from one cassette of an ordinary kind to another having a different pitch. The apparatus has an elongated rod on which an array of disk-shaped pieces each capable of supporting a wafer from its center hole is slidably mounted. These pieces are so connected that the separation between each of mutually adjacent pairs can vary but not to exceed a predetermined maximum distance. The piece at one end of the array is affixed to the rod and the one at the other end is attached to a power source and is moved along the rod.

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Patent Owner(s)

Patent OwnerAddress
INTELMATEC CORPORATION41353 ALBRAE STREET FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagawa, Minoru Fremont, CA 18 172

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