Interferometer with thin absorbing beam equalizing pellicle

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United States of America Patent

PATENT NO 4955719
SERIAL NO

07282473

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Abstract

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An interferometer includes a thin, absorbing pellicle in the path of a test beam to attenuate the test beam so that its intensity is approximately equal to the intensity of a reference beam. The pellicle reflects less than about six percent of the test beam, thereby avoiding spurious reflections that produce spurious fringes.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayes, John B Tucson, AZ 18 673

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