Optical reduction system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4953960
SERIAL NO

07223968

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An unobscured catadioptric optical reduction system wherein all refractive elements are made of the same material. From its long conjugate end to its short conjugate end the system comprises a first lens group, a beamsplitter, a second lens group, a mirror and a third lens group arranged so that radiation entering the system at its long conjugate end passes through the first lens group, the beamsplitter, the second lens group, and is reflected by the mirror back through the second lens group and is reflected by the beamsplitter through the third lens group. Aberrations of the mirror are corrected by the refractive elements. Lateral color correction is obtained by balancing the power of the first lens group against the power of the third lens group.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VNETHERLANDS GELEEN LIMBURG

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Williamson, David M 26 Chimney Dr., Bethel, CT 06801 49 756

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation