Air gauge sensor

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United States of America Patent

PATENT NO 4953388
SERIAL NO

07301088

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pneumatic bridge air gauge sensor. A measurement leg and a reference leg are used to measure a gap between a measurement probe and a surface. The two legs are initially balanced resulting in no air flow therebetween. A mass air flow sensor coupled between the two legs detects the mass air flow between the two legs resulting from a change in the gap distance from the balanced state.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VNETHERLANDS GELEEN LIMBURG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barada, Andrew H New Canaan, CT 4 47

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