Scanning micromechanical probe control system
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United States of America Patent
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Aug 28, 1990
Grant Date -
N/A
app pub date -
Mar 24, 1989
filing date -
Mar 24, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The scanning micromechanical probe control system for controlling relative movement between a sensor probe and an adjacent sample surface includes a sensor probe for measuring a parameter which varies relative to the relative positioning of the probe and the adjacent surface adapted to generate an error signal indicating one of at least two discrete position conditions; an up/down counter for integrating the error signal and for generating an up/down count signal; and a position control servo for controlling the relative positioning of the probe and the surface responsive to the up/down count signal. An adaptive feedback control most preferably controls the rate of up/down positioning of the sensor probe and the rate of raster scanning of the probe relative to the target surface.
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