Method of measuring flow rate and flow meter for use in said method as well as apparatus for controlling flow rate of liquid using said flow meter
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United States of America Patent
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Aug 14, 1990
Grant Date -
N/A
app pub date -
Apr 14, 1989
filing date -
Nov 22, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A part of a tube, through which a fluid passes, is cooled by means of an electronic cooling element and a flow rate of the fluid is measured on the basis of a temperature of a surface of the tube cooled. Not only can the flow rate of the liquid flowing through the tube be determined in a noncontacting manner and a very small flow rate of the liquid be determined, but also the tube is cooled so that no bubbles are generated, and thus the measurment of the liquid, which is apt to generate gases, such as low boiling point liquid, is possible. In addition, the measurement is not influenced by the gases dissolved in the liquid and merely the temperature difference resulting from the flow of the fluid, that is, the rise of the temperature of the fluid, is detected to prevent the measurement from being influenced by the installing posture of the flow meter, so that a highly accurate measurement is possible. Consequently, stable and sure controlling flow rate of liquid is possible.
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