Autofocusing system for microscope having contrast detection means

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United States of America Patent

PATENT NO 4945220
SERIAL NO

07272597

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An autofocusing system for a microscope is disclosed. An autofocus target is placed between a colliminating lens and a relay lens of the microscope. The autofocus target contains a pattern of dark areas which are projected onto a specimen and reflected into a CCD camera array. The focus of the microscope is adjusted such that the variation in intensity of light through the pattern is maximized.

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Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS (A CA CORP )2400 CHARLESTON ROAD MOUNTAIN VIEW CA 94043

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Broome, Barry G Glendora, CA 36 959
Mallory, Chester L Campbell, CA 14 684
Pham, Hung V San Jose, CA 4 699
Wasserman, Phillip D Cupertino, CA 1 65

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