Making an amorphous layer

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United States of America Patent

PATENT NO 4942057
SERIAL NO

07085854

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Abstract

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Amorphous layers are made by decomposing one or several gaseous compounds which include an element or elements to be deposited. These are group 3 and 5 or group 4 elements but amorphous layers of other metals can also be made. The compound is added in a small concentration to a hot gas, preferably hydrogen, helium or argon and a diffusor accelerates the mixture while molecular clusters of the element or elements are formed and impinge upon a target for depositing thereon.

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Patent Owner(s)

Patent OwnerAddress
DORNIER SYSTEM GMBH POSTFACH 1360 D-7990 FRIEDRICHSHAFEN 1 WEST GERMANYNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hauser, Manfred Leonberg, DE 12 180
Hoeschele, Joerg Stuttgart, DE 11 42
Steinwandel, Juergen Markdorf, DE 50 428

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