Semiconductor wafer carrier input/output drawer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4934767
SERIAL NO

06863960

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Abstract

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Plastic cassettes carrying semiconductor wafers are loaded into and/or unloaded from an extended open drawer. The drawer is retractable to a closed position in a frame where the cassettes may be removed from or returned to the drawer by a programmable elevator. The frame may have several drawers and cassettes may be safely loaded into or unloaded from the open drawer while cassettes are being removed from or returned to a closed drawer.

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Patent Owner(s)

Patent OwnerAddress
SILICON VALLEY GROUP INC101 METRO DRIVE SUITE 400 SAN JOSE CA 95110

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goldman, Jon C Orange, CA 9 296
Hoyt, III Hazen L Costa Mesa, CA 3 53
Mello, William R Huntington Beach, CA 4 71

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