Apparatus for coating a substrate
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United States of America Patent
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-
May 29, 1990
Issued Date -
N/A
app pub date -
Jul 9, 1987
filing date -
Dec 23, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A coating applicator is provided for depositing a film on a surface of glass and other substrates by chemical vapor deposition. The applicator includes a pair of opposing coating nozzles for applying a vaporized coating chemical reactant in a carrier gas to the surface at such a concentration and velocity that coating of the surface is achieved under substantially reaction rate controlled conditions. Each coating nozzle is positioned adjacent the surface with a small clearance therebetween which is open to the outside atmosphere. The opposing coating nozzles are directed toward each other at a selected angle with respect to a normal to the surface of the substrate. The angle and the clearance provides a condition where there is substantially no intermixing of coating vapors with the outside atmosphere.
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