High temperature interconnect system for an integrated circuit

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United States of America Patent

PATENT NO 4920071
SERIAL NO

07086200

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Abstract

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A semiconductor integrated circuit device is provided with an electrical interconnect system which is stable at high temperatures. The interconnect system employs refractory metal compounds which are electrically conductive, which form stable couples with silicon and compounds thereof, and which remain stable at temperatures exceeding approximately 500.degree. C.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL SEMICONDUCTOR CORPORATION2900 SEMIDUCTOR DRIVE SANTA CLARA CA 95051

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Thomas, Michael E Cupertino, CA 63 2107

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