Synthetic imaging technique
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United States of America Patent
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Apr 3, 1990
Grant Date -
N/A
app pub date -
May 12, 1988
filing date -
May 12, 1988
priority date (Note) -
Expired
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Abstract
An optical system wherein a mask pattern occurring at a predetermined period is imaged with a period less than the predetermined period. Spatial filter means are disposed within the optical system for permitting only the two (positive and negative) first orders of light from an illumination source diffracted by the mask pattern to pass therethrough.
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