Semiconductor processing system with robotic autoloader and load lock
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United States of America Patent
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-
Mar 27, 1990
Issued Date -
N/A
app pub date -
Aug 25, 1987
filing date -
Jan 22, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
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