Multi-stage molecular pump
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United States of America Patent
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-
Jan 16, 1990
Grant Date -
N/A
app pub date -
Aug 15, 1988
filing date -
Aug 24, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A molecular pump of the Hollweck type is composed of a plurality of stages in order to improve the pumping characteristics. Rotor and stator consist of different portions which are provided alternately with helical grooves and with smooth outer and inner surfaces respectively. The cooperating surfaces of the individual rotor and stator portions are tapered.
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