Multiple electrode plasma reactor power distribution system
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United States of America Patent
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-
Dec 12, 1989
Grant Date -
N/A
app pub date -
Sep 15, 1987
filing date -
Sep 15, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A multiple electrode plasma reactor power circuit that utilizes a power splitting device, such as a center-tapped coil, to deliver balanced power to a plurality of powered electrodes. Balanced plasmas are thereby created between powered electrodes and grounded electrodes. In a preferred embodiment a plurality of center-tapped coils are connected to deliver balanced power to several powered electrodes located in a plurality of reactor chambers.
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