Method and system for loading wafers
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United States of America Patent
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-
Dec 12, 1989
Grant Date -
N/A
app pub date -
Oct 28, 1986
filing date -
Oct 28, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes and presents them successively to a transfer location. The wafer transport assembly, including a robotic arm and a vacuum pickup element, is then able to transport individual wafers from the cassettes to the support table. By rotating the support table, a plurality of wafers can be placed in a desired order. The wafer support table may then be moved to a location proximate a processing chamber, such as a chemical vapor deposition reactor, and processed and unprocessed wafers efficiently exchanged by the transport assembly.
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