Compact micromotion translator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4884003
SERIAL NO

07291178

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The translation device includes first and second plates, one movable relative to the other in response to a plurality of piezoelectric transducers. A flexure is located between the first and second plates and attached to each of them to spring-load the piezoelectric transducers. The driver circuit produces voltages which are balanced and applied to the piezoelectric transducers to produce tilt-free translation of the first plate relative to the second.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayes, John B Tucson, AZ 18 673

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