Direct imaging monochromatic electron microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 21, 1989
Issued Date -
N/A
app pub date -
Nov 8, 1988
filing date -
Jun 5, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, and focusing the electrons through an image plane. A collimating lens for collimating the electrons into beams is located at its focal distance from the image plane. An energy filter with an entrance aperture is receptive of the beams to transit monochromatic beams, and a transfer lens is receptive of the monochromatic beams for refocusing the same through a projection lens to effect an image of the plurality of spots in a projection plane. The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter. The entrance aperture is positioned from the transfer lens by approximately a distance optically conjugate to the distance between the objective lens and the collimating lens.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully