Positioning device for a scanning tunneling microscope

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United States of America Patent

PATENT NO 4871938
SERIAL NO

07206091

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A piezoelectric positioning device for controlling the three dimensional horizontal and vertical movement of a tip relative to the sample in a scanning tunneling microscope. A thin walled cone or cylinder shaped member formed of piezoelectric material having an outer surface and an inner surface. A tip member positioned at the bottom of the cone or cylindrical member. A plurality of substantially similar electrode members positioned around one of the surfaces of the cone or cylinder shaped member to form opposite pairs of electrodes to control the horizontal movement of the tip in two of the three dimensions in accordance with voltages applied to the pairs of electrodes. A unitary member positioned around the other of the surfaces of the cone or cylinder shaped member to form a unitary electrode to control the vertical movement of the tip in the third dimension in accordance with voltage applied to the unitary electrode.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elings, Virgil B Santa Barbara, CA 54 2876
Gurley, John A Santa Barbara, CA 28 1442

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