Laminar flow hood with static electricity eliminator
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United States of America Patent
Stats
-
Sep 5, 1989
Grant Date -
N/A
app pub date -
Oct 1, 1987
filing date -
Oct 8, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A frame is placed in the flow of incident air from a laminar flow hood, and bare wires and insulated wires are stretched over the frame. A source including a transformer produces an alternating voltage. One of the outputs thereof is directly connected to the insulating wires and the other output thereof is connected to the bare wires via a capacitor. An electrode placed inside the volume of the cabinet fed with air from the hood is connected to a DC amplifier which applies a correcting voltage to the insulated wires. This apparatus turns out to be highly effective, in particular, for removing dust and neutralizing charge when manufacturing VLSI circuits.
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