Piezoelectric precision positioning device
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United States of America Patent
Stats
-
Aug 22, 1989
Grant Date -
N/A
app pub date -
Mar 4, 1988
filing date -
Jul 4, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A piezoelectric precision positioning device for moving an object in three coordinate directions is described, comprising (a) an at least approximately plane-parallel cut piezoelectric disk (5), (b) an electrode arrangement (6, 7, 8, 17), provided with electrical connections (9, 10, 11, 18), on the surfaces parallel to each other, with which three independently controllable electrical fields in the piezoelectric disk (5) can be adjusted, (c) a fork-shaped clamping device (1, 2) which embraces the piezoelectric disk (5), in an electrically insulated manner with respect to the electrode arrangement (6, 7, 8, 17), at at least three pressure points (13, 14, 15, 16), which are situated symmetrically with respect to each other, on the circumferential surface such that (d) one of the electrodes (8) is situated in the open part of the fork-shaped clamping device (1, 2), in which case (e) the object (19) to be positioned is arranged in an electrically insulated manner on an electrode surface (17) in the field region of this electrode (8).
First Claim
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Patent Citation Ranking
- 4 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 36 Age