Importance

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Abstract

A variable interferometric device comprising a Fabry-Perot interferometer composed of a pair of reflecting substances facing each other with a space therebetween formed by spacers and a means for deforming at least one of the reflecting substances constituting said Fabry-Perot interferometer to thereby change the interferometric characteristics of said Fabry-Perot interferometer. Moreover, an optical sensor comprising a light source, a first Fabry-Perot interferometric device, the interferometric characteristics of which vary with the physical quantity of the object to be measured, a light-dividing means for dividing the light from the light source into a first light beam and a second light beam, a second Fabry-Perot interferometric device functioning as a reference standard, the operational conditions of which are set at fixed values, a first photodetector for receiving the first light beam from said light-dividing means through the second Fabry-Perot interferometric device, a second photodetector for receiving the second light beam from said light-dividing means through the second Fabry-Perot interferometric device, and a signal-processing circuit for comparing the output signal from the first photodetector with the output signal from the second photodetector to thereby determine the physical quantity of the object to be measured.

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First Claim