Ion beam profile analyzer with noise compensation
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United States of America Patent
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May 23, 1989
Issued Date -
N/A
app pub date -
Sep 1, 1988
filing date -
Jun 7, 1988
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Abstract
An apparatus for producing a signal that is representative of the profile of an ion beam and compensates for the system noise of the ion beam profile scanner includes an ion beam profile scanner which produces a beam profile signal that is proportional to the profile of the ion beam and that has system noise from the scanner. A reference signal is produced which has a frequency proportional to the scan frequency of the beam profile signal, and at least one harmonic of the reference signal is also produced. The reference signal and at least one harmonic of the reference signal are individually adjusted in phase and amplitude to match the system noise in the beam profile signal, and the two adjusted signals are subtracted from the beam profile signal in a summation circuit. The resulting signal is representative of the beam profile and has reduced noise as compared to the beam profile signal.
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