Pumps
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United States of America Patent
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-
May 23, 1989
Grant Date -
N/A
app pub date -
Jun 20, 1988
filing date -
Jul 4, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A turbo-molecular pump has stator discs 2 separated from one another by spacer rings 3 constructed in such a manner that gases streaming back can re-enter the suction space 8 through reduced portions 5 at the outer diameter and through radial recesses 6. Inner reduced portions 7 serve for the additional location of the stator discs 2.
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