Two-wavelength phase-shifting interferometer and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 23, 1989
Grant Date -
N/A
app pub date -
Mar 19, 1986
filing date -
Mar 19, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An improved apparatus and method are described for accurately 'reconstructing' steep surface profiles, such as for aspheric surfaces, using improved two-wavelength phase-shifting interferometry, wherein single-wavelength precision is obtained over surfaces having departures of hundreds of visible wavelengths from a reference surface. The disclosed technique avoids cumulative summing of detector errors over a large detector array by computing the 'equivalent' phase for each detector independently of the intensities of other detectors. Inaccurate phase data points having an equivalent fringe contrast less than a predetermined threshold are eliminated from data from which contour maps of the aspheric surface are displayed or plotted.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully