Sensors
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United States of America Patent
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May 16, 1989
Grant Date -
N/A
app pub date -
Jan 21, 1988
filing date -
Jan 24, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A solid sensor, for sensing a physical parameter such as pressure, comprises a resonantly vibratable beam formed across a cavity in a substrate by micro-machining, and arranged such that changes in the parameter vary its resonant frequency. The beam either consists of or has deposited on it a material exhibiting piezo-electric effect, so that vibration of the beam can be excited by using the effect. This is achieved using light, either by forming a photodiode in the substrate in or near the beam, so that illuminating the photodiode causes a voltage to be applied to the beam, or, in the case where the piezo-electric material exhibits surface piezo-electric effect, by directly illuminating the beam.
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