Laser manufacture
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United States of America Patent
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-
May 16, 1989
Grant Date -
N/A
app pub date -
May 8, 1986
filing date -
May 15, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A ridge waveguide laser structure is manufactured by a method including providing a photoresist stripe (8) on an exposed area of a p cap layer (4) of a multilayer laser wafer; etching channels (9) through the cap layer (4) and a p passive layer (3) using the stripe (8) and an oxide layer window (FIG. 4) as a mask; evaporating a passivating and insulating oxide (11, 11a) over the wafer, there being breaks (C) in the oxide where the stripe (8) is undercut during channel etching; and removing the stripe (8) and the oxide (11a) on it by a lift-off technique.
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