Soft vacuum electron beam patterning apparatus and process
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 2, 1989
Grant Date -
N/A
app pub date -
Apr 28, 1986
filing date -
Apr 28, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Loading Importance Indicators... 
Abstract
A cold cathode glow discharge electron gun operating in the abnormal glow region produces a wide area collimated electron beam employed for flood exposure of thin film materials through electron beam transmission masks, resulting in spatially localized exposure and patterning of the thin film materials.
Loading the Abstract Image...
OK
First Claim
Family
Loading Family data...
International Classification(s)
- Non-US Classification not provided for expired patents
Cited Art Landscape
Patent Citation Ranking
- Citation Ranking not provided for expired patents
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully